SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Nano-film assisted anodic bonding
Wei, J.; Xie, H.; Wong, C. K.; Lee, L. C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro
- 作者Wei, J.; Xie, H.; Wong, C. K.; Lee, L. C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro
- 卷第4936卷
- 印刷ISSN0277-786X
- 文件大小134.14KB
- 发表时间2002
- DOI10.1117/12.499575
- 页码455-463