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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - <title>Nano-film assisted anodic bonding</title>

SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Nano-film assisted anodic bonding

Wei, J.; Xie, H.; Wong, C. K.; Lee, L. C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro
  • 作者Wei, J.; Xie, H.; Wong, C. K.; Lee, L. C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro
  • 卷第4936卷
  • 印刷ISSN0277-786X
  • 文件大小134.14KB
  • 发表时间2002
  • DOI10.1117/12.499575
  • 页码455-463
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