![SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser-based Micro- and Nanoprocessing XI - Ultra-short pulse laser micro patterning with highest throughput by utilization of a novel multi-beam processing head]()
SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser-based Micro- and Nanoprocessing XI - Ultra-short pulse laser micro patterning with highest throughput by utilization of a novel multi-beam processing headKlotzbach, Udo; Washio, Kunihiko; Kling, Rainer; Homburg, Oliver; Jarczynski, Manfred; Mitra, Thomas; Brüning, Stephan · 2017