Laser writing techniques for photomask fabrication using a femtosecond laser

• 作者K. Venkatakrishnan; B.K.A. Ngoi; P. Stanley; L.E.N. Lim; B. Tan; N.R. Sivakumar
• 卷第74卷
• 期第4期
• 印刷ISSN0947-8396
• 电子ISSN1432-0630
• 文件大小151.94KB
• 发表时间2002-04
• DOI10.1007/s003390101030
• 页码493-496