Changes in the state of impurities and the corresponding force fields in silicon after high-temperature cyclic annealings

G. M. Voronkova; V. V. Grigor’ev; A. V. Zuev; V. V. Zuev; A. D. Kiryukhin; É. A. Manykin; V. I. Chmyrev; S. A. Shcherbakov

作者G. M. Voronkova; V. V. Grigor’ev; A. V. Zuev; V. V. Zuev; A. D. Kiryukhin; É. A. Manykin; V. I. Chmyrev; S. A. Shcherbakov
卷第97卷
期第5期
印刷ISSN1063-7761
电子ISSN1090-6509
文件大小140.03KB
发表时间2003-11
DOI10.1134/1.1633953
页码978-988

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