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Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers

Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers

Saran, Anish; Abeysinghe, Don C; Flenniken, Ron; Boyd, Joseph T

作者Saran, Anish; Abeysinghe, Don C; Flenniken, Ron; Boyd, Joseph T
卷第13卷
期第2期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小108.50KB
发表时间2003
DOI10.1088/0960-1317/13/2/325
页码346-351

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