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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Electrostatic deflections of volume constrained MEMS

[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Electrostatic deflections of volume constrained MEMS

Pelesko, J.A.; Goldsztein, G.

作者Pelesko, J.A.; Goldsztein, G.
文件大小300.48KB
发表时间2003
DOI10.1109/icmens.2003.1221968
页码76-80

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