Effect of hydrogen dilution on the optical properties of hydrogenated amorphous silicon-nitrogen films prepared by plasma deposition
Yamaguchi, Masaaki; Morigaki, Kazuo
- 期刊名称Philosophical Magazine
- 作者Yamaguchi, Masaaki; Morigaki, Kazuo
- 卷第83卷
- 期第25期
- 印刷ISSN1478-6435
- 电子ISSN1478-6443
- 文件大小597.53KB
- 发表时间2003-09
- DOI10.1080/1478643031000151402
- 页码2955-2972