Thermokinetic actuation for batch assembly of microscale hinged structures
- 期刊名称Journal of Microelectromechanical Systems
- 作者Kaajakari, V.; Lal, A.
- 卷第12卷
- 期第4期
- 印刷ISSN1057-7157
- 文件大小673.82KB
- 发表时间2003-08
- DOI10.1109/jmems.2003.811747
- 页码425-432
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