[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - P/sup +/ silicon recessed micromechanical structures for MEMS applications
Pal, P.; Tuli, S.; Chandra, S.
- 作者Pal, P.; Tuli, S.; Chandra, S.
- 文件大小239.42KB
- 发表时间2003
- DOI10.1109/dtip.2003.1287072
- 页码378-381