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[IEEE 2003 8th International Symposium on Plasma- and Process-Induced Damage - Corbeil-Essonnes, France (24-25 April 2003)] 2003 8th International Symposium Plasma- and Process-Induced Damage. - Recent trends in 300-mm plasma equipment

[IEEE 2003 8th International Symposium on Plasma- and Process-Induced Damage - Corbeil-Essonnes, France (24-25 April 2003)] 2003 8th International Symposium Plasma- and Process-Induced Damage. - Recent trends in 300-mm plasma equipment

Vinogradov, G.Y.

作者Vinogradov, G.Y.
文件大小404.87KB
发表时间2003
DOI10.1109/ppid.2003.1200949
页码168-173

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