[IEEE 15th Biennial University/Government/Industry Microelectronics Symposium - Boise, ID, USA (30 June-2 July 2003)] Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) - Hands-on MEMS
- 作者Frechette, L.; Modi, V.; Miller, F.; Farmer, K.R.
- 文件大小337.62KB
- 发表时间2003
- DOI10.1109/ugim.2003.1225717
- 页码157-160
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