DEVELOPMENT OF POLYSILOXANE ELECTRON BEAM RESIST FOR OPTICAL ELEMENTS
- 期刊名称Molecular Crystals and Liquid Crystals
- 作者Sakurai, Yoshiaki; Satoh, Kazuo; Fukuda, Hiroki; Yotsuya, Tsutom
- 卷第406卷
- 期第1期
- 印刷ISSN1542-1406
- 电子ISSN1563-5287
- 文件大小337.47KB
- 发表时间2003-01
- DOI10.1080/744818990
- 页码85-91
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