A static turbine flow meter with a micromachined silicon torque sensor
- 期刊名称Journal of Microelectromechanical Systems
- 作者Svedin, N.; Stemme, E.; Stemme, G.
- 卷第12卷
- 期第6期
- 印刷ISSN1057-7157
- 文件大小2290.26KB
- 发表时间2003-12
- DOI10.1109/jmems.2003.820271
- 页码937-946
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