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Development and characterization of surface micromachined, out-of-plane hot-wire anemometer

Development and characterization of surface micromachined, out-of-plane hot-wire anemometer

Chen, J.; Chang Liu,
  • 期刊名称Journal of Microelectromechanical Systems
  • 作者Chen, J.; Chang Liu,
  • 卷第12卷
  • 期第6期
  • 印刷ISSN1057-7157
  • 文件大小1651.06KB
  • 发表时间2003-12
  • DOI10.1109/jmems.2003.820261
  • 页码979-988
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