Angular anisotropy of electron energy distributions in inductively coupled plasmas
- 期刊名称Journal of Applied Physics
- 作者Vasenkov, Alex V.; Kushner, Mark J.
- 卷第94卷
- 期第9期
- 印刷ISSN0021-8979
- 文件大小458.12KB
- 发表时间2003
- DOI10.1063/1.1614428
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