Microelectromechanical displacement sensing using InAs/AlGaSb heterostructures
- 期刊名称Applied Physics Letters
- 作者Yamaguchi, Hiroshi; Miyashita, Sen; Hirayama, Yoshiro
- 卷第82卷
- 期第3期
- 印刷ISSN0003-6951
- 文件大小452.93KB
- 发表时间2003
- DOI10.1063/1.1537047
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