[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Sub 100 nm lithography based on plasmon polariton resonance
- 作者Xiangang Luo, ; Ishihara, T.
- 文件大小113.88KB
- 发表时间2003
- DOI10.1109/imnc.2003.1268614
- 页码138-139
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