[IEEE 2003 8th International Symposium on Plasma- and Process-Induced Damage - Corbeil-Essonnes, France (2003.04.25-2003.04.25)] 2003 8th International Symposium Plasma- and Process-Induced Damage. - 2003 8th International Symposium on Plasma- and Process-Induced Damage. (Cat. No.03TH8669)