[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Transition of MEMS technology to nanofabrication
Jakeway, S.C.; Crabtree, H.J.; Veres, T.; Cameron, N.S.; Luesebrink, H.; Glinsner, T.
- 作者Jakeway, S.C.; Crabtree, H.J.; Veres, T.; Cameron, N.S.; Luesebrink, H.; Glinsner, T.
- 文件大小504.41KB
- 发表时间2003
- DOI10.1109/icmens.2003.1221977
- 页码118-122