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[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Kinetic simulations of capacitively coupled plasmas

[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Kinetic simulations of capacitively coupled plasmas

Kolobov, V.; Arslanbekov, R.
  • 作者Kolobov, V.; Arslanbekov, R.
  • 文件大小65.14KB
  • 发表时间2003
  • DOI10.1109/plasma.2003.1228602
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