Incorporation of Functional Metal Oxide Materials in Chemical Microsystems
- 期刊名称MRS Proceedings
- 作者Yao, Nan; Yeung, King Lun
- 卷第788卷
- 电子ISSN1946-4274
- 文件大小222.96KB
- 发表时间2003-1
- DOI10.1557/PROC-788-L3.30
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