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Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier Diodes

Kimoto, Tsunenobu; Danno, Katsunori; Fujihira, Keiko; Shiomi, Hiromu; Matsunami, Hiroyuki

期刊名称Materials Science Forum
作者Kimoto, Tsunenobu; Danno, Katsunori; Fujihira, Keiko; Shiomi, Hiromu; Matsunami, Hiroyuki
电子ISSN1662-9752
文件大小280.57KB
发表时间2003
DOI10.4028/www.scientific.net/MSF.433-436.197
页码197-200