SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications

Hasche, Klaus; Thomsen-Schmidt, Peter; Krumrey, Michael; Ade, George; Ulm, Gerhard; Stuempel, Juergen; Schaedlich, Stefan; Frank, Wilfried; Procop, Mathias; Beck, Uwe; Decker, Jennifer E.; Brown, Nicholas

作者Hasche, Klaus; Thomsen-Schmidt, Peter; Krumrey, Michael; Ade, George; Ulm, Gerhard; Stuempel, Juergen; Schaedlich, Stefan; Frank, Wilfried; Procop, Mathias; Beck, Uwe; Decker, Jennifer E.; Brown, Nicholas
卷第5190卷
印刷ISSN0277-786X
文件大小374.62KB
发表时间2003
DOI10.1117/12.512216
页码165-172

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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications