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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining Technology for Micro-Optics and Nano-Optics - <title>Microfabrication of controlled angle diffusers used for resolution enhancement in microlithography</title>

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining Technology for Micro-Optics and Nano-Optics - Microfabrication of controlled angle diffusers used for resolution enhancement in microlithography

Himel, Marc D.; Poutous, Menelaos K.; Stack, Jared D.; Leonard, Jerry L.; Johnson, Eric G.
  • 作者Himel, Marc D.; Poutous, Menelaos K.; Stack, Jared D.; Leonard, Jerry L.; Johnson, Eric G.
  • 卷第4984卷
  • 印刷ISSN0277-786X
  • 文件大小370.49KB
  • 发表时间2003
  • DOI10.1117/12.477845
  • 页码230-233
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