Dislocation-free Czochralski Si crystal growth without a thin neck: dislocation behavior due to incomplete seeding

• 作者Toshinori Taishi; Xinming Huang; Ichiro Yonenaga; Keigo Hoshikawa
• 卷第258卷
• 印刷ISSN0022-0248
• 文件大小237.16KB
• 发表时间2003
• DOI10.1016/s0022-0248(03)01501-x
• 页码58-64