Influence of the substrate coating temperature on the vacuum properties of Ti–Zr–V non-evaporable getter films

• 作者C Benvenuti; P Chiggiato; P.Costa Pinto; A Prodromides; V Ruzinov
• 卷第71卷
• 印刷ISSN0042-207X
• 文件大小628.74KB
• 发表时间2003
• DOI10.1016/s0042-207x(02)00755-8
• 页码307-315