3D STRUCTURES FORMATION IN A SINGLE LAYER SU-8 CAR USING DUAL UV AND ELECTRON-BEAM LITHOGRAPHY

• 期刊名称International Journal of Computational Engineering Science
• 作者KUDRYASHOV, V. A.; YUAN, X. -C.; TAN, T. L.; LEE, P.; KARIM, S. F. A.; TAN, B. L.
• 卷第4卷
• 期第3期
• 印刷ISSN1465-8763
• 文件大小587.48KB
• 发表时间2003-09
• DOI10.1142/S1465876303002131
• 页码719-723