SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optomechanics 2003 - Diamond-turning-assisted fabrication of a high-numerical-aperture lens assembly for 157-nm microlithography
Arriola, Edmund W.; Hatheway, Alson E.
- 作者Arriola, Edmund W.; Hatheway, Alson E.
- 卷第5176卷
- 印刷ISSN0277-786X
- 文件大小622.04KB
- 发表时间2003
- DOI10.1117/12.503765
- 页码36-43