SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MOEMS Display and Imaging Systems - Characterization of spatial light modulators for microlithography

Duerr, Peter; Dauderstaedt, Ulrike; Kunze, Detlef; Auvert, Marine; Bakke, Thor; Schenk, Harald; Lakner, Hubert; Urey, Hakan

作者Duerr, Peter; Dauderstaedt, Ulrike; Kunze, Detlef; Auvert, Marine; Bakke, Thor; Schenk, Harald; Lakner, Hubert; Urey, Hakan
卷第4985卷
印刷ISSN0277-786X
文件大小494.15KB
发表时间2003
DOI10.1117/12.477803
页码211-221

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