SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Microelectronics: Design, Technology, and Packaging - Process management and design for MEMS and microelectronics technologies
Abbott, Derek; Hahn, Kai; Popp, Jens; Eshraghian, Kamran; Musca, Charles A.; Wagener, Andreas; Pavlidis, Dimitris; Weste, Neil
- 作者Abbott, Derek; Hahn, Kai; Popp, Jens; Eshraghian, Kamran; Musca, Charles A.; Wagener, Andreas; Pavlidis, Dimitris; Weste, Neil
- 卷第5274卷
- 印刷ISSN0277-786X
- 文件大小1504.77KB
- 发表时间2003
- DOI10.1117/12.522882