SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Laser-assisted chemical vapor deposition of carbon for the growth of high-aspect ratio microrods and direct writing of surface patterns
Jeong, Sung Ho; Kim, Jinbun; Kim, Sunghoon; Lee, Dongjun; Miyamoto, Isamu; Kobayashi, Kojiro F.; Sugioka, Koji; Poprawe, Reinhart; Helvajian, Henry
- 作者Jeong, Sung Ho; Kim, Jinbun; Kim, Sunghoon; Lee, Dongjun; Miyamoto, Isamu; Kobayashi, Kojiro F.; Sugioka, Koji; Poprawe, Reinhart; Helvajian, Henry
- 卷第4830卷
- 印刷ISSN0277-786X
- 文件大小334.37KB
- 发表时间2003
- DOI10.1117/12.486576
- 页码177-181