SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Development of low-absorption AR coatings for CO<formula><inf><roman>2</roman></inf></formula> laser by ion assisted deposition

Iwamoto, Hiromi; Ebata, Keiji; Nanba, Hirokuni; Miyamoto, Isamu; Kobayashi, Kojiro F.; Sugioka, Koji; Poprawe, Reinhart; Helvajian, Henry

作者Iwamoto, Hiromi; Ebata, Keiji; Nanba, Hirokuni; Miyamoto, Isamu; Kobayashi, Kojiro F.; Sugioka, Koji; Poprawe, Reinhart; Helvajian, Henry
卷第4830卷
印刷ISSN0277-786X
文件大小377.25KB
发表时间2003
DOI10.1117/12.486526
页码301-306

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