Handbook of Infrared Spectroscopy of Ultrathin Films (Tolstoy/Infrared Spectroscopy) || Infrared Spectroscopy of Thin Layers in Silicon Microelectronics
Tolstoy, Valeri P.; Chernyshova, Irina V.; Skryshevsky, Valeri A.
- 作者Tolstoy, Valeri P.; Chernyshova, Irina V.; Skryshevsky, Valeri A.
- 文件大小491.14KB
- 发表时间2003
- DOI10.1002/047123432X.ch5
- 页码416-475