Current Status of Vacuum Microelectronics
- 期刊名称IEEJ Transactions on Fundamentals and Materials
- 作者Kanemaru, Seigo; Nagao, Masayoshi
- 卷第123卷
- 期第5期
- 印刷ISSN0385-4205
- 电子ISSN1347-5533
- 文件大小758.97KB
- 发表时间2003
- DOI10.1541/ieejfms.123.425
- 页码425-428
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