The Study of Modified Layers in SiCOH Dielectrics using Spectroscopic Ellipsometry
- 期刊名称MRS Proceedings
- 作者Worsley, Marcus A.; Bent, Stacey F.; Gates, Stephen M.; Kumar, Kaushik; Dalton, Timothy; Hedrick, Jeffrey C.
- 卷第766卷
- 印刷ISSN0272-9172
- 电子ISSN1946-4274
- 文件大小145.38KB
- 发表时间2003
- DOI10.1557/PROC-766-E3.29
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