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Effects of Nitridation on the Characteristics of Silicon Dioxide: Dielectric and Structural Properties from ab initio Calculations

Effects of Nitridation on the Characteristics of Silicon Dioxide: Dielectric and Structural Properties from ab initio Calculations

Fischer, Dominik; Curioni, Alessandro; Billeter, Salomon; Andreoni, Wanda
  • 作者Fischer, Dominik; Curioni, Alessandro; Billeter, Salomon; Andreoni, Wanda
  • 卷第92卷
  • 期第23期
  • 印刷ISSN0031-9007
  • 电子ISSN1079-7114
  • 文件大小164.53KB
  • 发表时间2004
  • DOI10.1103/physrevlett.92.236405
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