Coherent and incoherent interference modelling and measurement of anisotropic multilayer stacks using conventional ellipsometry
- 作者H. Touir; M. Stchakovsky; R. Ossikovski; M. Warenghem
- 印刷ISSN0040-6090
- 文件大小105.83KB
- 发表时间2004
- DOI10.1016/j.tsf.2003.11.210
- 页码628-631
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