Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure
- 作者G. Capote; R. Prioli; P.M. Jardim; A.R. Zanatta; L.G. Jacobsohn; F.L. Freire Jr.
- 印刷ISSN0022-3093
- 文件大小349.48KB
- 发表时间2004
- DOI10.1016/j.jnoncrysol.2004.03.029
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