SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MOEMS Display and Imaging Systems II - Application of spatial light modulators for microlithography
- 作者Dauderstaedt, Ulrike A.; Duerr, Peter; Karlin, Tord; Schenk, Harald; Lakner, Hubert; Urey, Hakan; Dickensheets, David L.
- 卷第5348卷
- 印刷ISSN0277-786X
- 文件大小599.22KB
- 发表时间2004
- DOI10.1117/12.528798
- 页码119-126
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