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[IEEE 2004 IEEE International Reliability Physics Symposium. - Phoenix, AZ, USA (25-29 April 2004)] 2004 IEEE International Reliability Physics Symposium. Proceedings - Correlation between Stress-Induced Leakage Current (SILC) and the HfO/sub 2/ bulk trap density in a SiO/sub 2//HfO/sub 2/ stack

[IEEE 2004 IEEE International Reliability Physics Symposium. - Phoenix, AZ, USA (25-29 April 2004)] 2004 IEEE International Reliability Physics Symposium. Proceedings - Correlation between Stress-Induced Leakage Current (SILC) and the HfO/sub 2/ bulk trap density in a SiO/sub 2//HfO/sub 2/ stack

Crupi, F.; Degraeve, R.; Kerber, A.; Kwak, D.H.; Groeseneken, G.

作者Crupi, F.; Degraeve, R.; Kerber, A.; Kwak, D.H.; Groeseneken, G.
文件大小411.89KB
发表时间2004
DOI10.1109/RELPHY.2004.1315321
页码181-187

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