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Improving the performance of interferometers in metrological scanning probe microscopes

Dai, Gaoliang; Pohlenz, Frank; Danzebrink, Hans-Ulrich; Hasche, Klaus; Wilkening, Guenter

期刊名称Measurement Science and Technology
作者Dai, Gaoliang; Pohlenz, Frank; Danzebrink, Hans-Ulrich; Hasche, Klaus; Wilkening, Guenter
卷第15卷
期第2期
印刷ISSN0957-0233
电子ISSN1361-6501
文件大小336.74KB
发表时间2004-02-01
DOI10.1088/0957-0233/15/2/019
页码444-450