[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Three-dimensional nanofabrication (3D-NANO) down to 10-NM order using electron-beam lithography
Yamazaki, K.; Namatsu, H.
- 作者Yamazaki, K.; Namatsu, H.
- 文件大小337.51KB
- 发表时间2004
- DOI10.1109/MEMS.2004.1290658
- 页码609-612