[IEEE 2016 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2016.12.12-2016.12.13)] 2016 International Symposium on Semiconductor Manufacturing (ISSM) - A comprehensive “big-data-based” monitoring system for yield enhancement in semiconductor man ufacturingNakata, Kouta; Orihara, Ryohei; Mizuoka, Yoshiaki; Takagi, Kentaro · 2016