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Chemical structure of the interface in ultrathin HfO[sub 2]/Si films

Chemical structure of the interface in ultrathin HfO[sub 2]/Si films

Lee, Jong-Cheol; Oh, S.-J.; Cho, Moonju; Hwang, Cheol Seong; Jung, Ranju

期刊名称Applied Physics Letters
作者Lee, Jong-Cheol; Oh, S.-J.; Cho, Moonju; Hwang, Cheol Seong; Jung, Ranju
卷第84卷
期第8期
印刷ISSN0003-6951
文件大小332.72KB
发表时间2004
DOI10.1063/1.1645984

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