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Fabrication of nanostructures using scanning probe microscope lithography

Fabrication of nanostructures using scanning probe microscope lithography

Seunghyun Lee; Jungoh Kim; Wan Sub Shin; Ha-Jin Lee; Sunyoung Koo; Haiwon Lee

作者Seunghyun Lee; Jungoh Kim; Wan Sub Shin; Ha-Jin Lee; Sunyoung Koo; Haiwon Lee
卷第24卷
印刷ISSN0928-4931
文件大小497.09KB
发表时间2004
DOI10.1016/j.msec.2003.09.001
页码3-9

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