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Preparation of targets by sputter deposition

Preparation of targets by sputter deposition

Birgit Kindler; Willi Hartmann; Josef Klemm; Bettina Lommel; Jutta Steiner

作者Birgit Kindler; Willi Hartmann; Josef Klemm; Bettina Lommel; Jutta Steiner
卷第521卷
期第1期
印刷ISSN0168-9002
文件大小335.33KB
发表时间2004
DOI10.1016/j.nima.2003.11.153
页码222-226

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