Uniformity Improvement in SiC Epitaxial Growth by using Si-Condensation
- 期刊名称Materials Science Forum
- 作者Harada, Shinsuke; Nakayama, Koji; Sasaki, Makato; Shiomi, Hiromu
- 电子ISSN1662-9752
- 文件大小228.98KB
- 发表时间2004
- DOI10.4028/www.scientific.net/MSF.457-460.225
- 页码225-228
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