Retarded Growth of Sputtered HfO2 Films on Germanium
- 期刊名称MRS Proceedings
- 作者Kita, Koji; Sasagawa, Masashi; Toyama, Masahiro; Kyuno, Kentaro; Toriumi, Akira
- 卷第811卷
- 电子ISSN1946-4274
- 文件大小280.91KB
- 发表时间2004-1
- DOI10.1557/PROC-811-D5.5/B5.5
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