Atomically Controlled Impurity Doping in Si-Based CVD Epitaxial Growth
- 期刊名称MRS Proceedings
- 作者Murota, Junichi; Sakuraba, Masao; Tillack, Bernd
- 卷第809卷
- 电子ISSN1946-4274
- 文件大小15421.97KB
- 发表时间2004-1
- DOI10.1557/PROC-809-B10.1
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