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Defects induced by hydrogen implantation in n-Si/SiO2 structures

Defects induced by hydrogen implantation in n-Si/SiO2 structures

S. Simeonov; A. Gushterov; A. Szekeres; E. Kafedjiiska

作者S. Simeonov; A. Gushterov; A. Szekeres; E. Kafedjiiska
卷第76卷
印刷ISSN0042-207X
文件大小192.48KB
发表时间2004
DOI10.1016/j.vacuum.2004.07.036
页码303-306

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